반도체 가스

HCI

SiHCl₃

SiH₂Cl₂

CF₄

C₂F6

CHF₃

C₃F6

C₄F8

PH₃

AsH₃

BCl₃

Cl₂

SF6 (Sulfur Hexafluoride)

NH₃ (Ammonia)

HBr (Hydrogen Bromide)

혼합 가스

GeH₄ (Germane Mixtures)

B2₂H6 (Diborane Mixtures)

SiH₄ (Silane Mixtures)

PH₃ (Phosphine Mixtures)

HCl (Hydrogen Chloride Mixtures)

전자소재 가스

TCS

DCS

Chemical Precusor (CVD/ALD)

Chemical 기초소재

STC

CH₃Cl

MTS

DMA